microsensor

微感測器、微型敏感元件

學術名詞

• 微感測器：機械工程

英文釋義

1. A submicrometer- to millimeter-size device that converts a nonelectrical physical or chemical quantity, such as pressure, acceleration, temperature, or gas concentration, into an electrical signal; it is generally able to offer better sensitivity, accuracy, dynamic range, and reliability, as well as lower power consumption, compared to larger counterparts.